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Sputtering and sputter deposition are widely used techniques for the erosion of surfaces and the deposition of films. Sputtering, also known as sputter etching, is used for patterning semiconductor ...
Sputter deposition in ionic liquids represents a versatile physical vapour technique for the synthesis of colloidal nanoparticles free of chemical contaminants and stabilising ligands. In this ...
Many applications use a manufacturing process known as thin-film sputtering deposition. The typical sputtering process uses an ion beam to impact the surface of a sputter material such as gold, silver ...
Thin films play a crucial role in the fabrication of several components and devices, such as protective coatings, integrated circuits, solar cells, and optical ...
Configuration of Thin Film Deposition Sputter Systems It is possible to configure thin film deposition sputter systems with many different hardware or software options, which include substrate pre ...
The International Symposium on Reactive Sputter Deposition was established in Ghent in the year 2000. It provided a platform among leading international scientists, engineers and students for ...
The research group DRAFT (Dedicated Research on Advanced Films and Targets) studies magnetron sputter deposition in general. The group started in the 1980's, with the deposition of Zn/Cu alloys on ...